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Lecture notes on principles of plasma processing/ Francis F. Chen and Jane P. Chang.

by Chen, Francis F | Chang, Jane P.

Material type: Text Text Publication details: New York : Kluwer Academic/Plenum Publishers, 2003Other title: Principles of plasma processing.Availability: Items available for loan: Central Library, Sikkim University (1) Call number: 530.44 CHE/L.

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Lecture notes on principles of plasma processing/ Francis F. Chen and Jane P. Chang.

by Chen, Francis F | Chang, Jane P.

Material type: Text Text Publication details: New York : Kluwer Academic/Plenum Publishers, 2003Other title: Principles of plasma processing.Availability: Items available for loan: Science Library, Sikkim University (1) Call number: 530.44 CHE/L.

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Lecture notes on principles of plasma processing/ Francis F. Chen and Jane P. Chang.

by Chen, Francis F | Chang, Jane P.

Material type: Text Text Publication details: New York : Kluwer Academic/Plenum Publishers, 2003Other title: Principles of plasma processing.Availability: Items available for loan: Science Library, Sikkim University (1) Call number: 530.44 CHE/L.

Place hold Add to cart
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