TY  - BOOK
AU  - Leach,Richard
TI  - Optical Measurement of Surface Topography
SN  - 9783642120121
U1  - 910 
PY  - 2011///
CY  - Chennai
PB  - Springer
KW  - Microwaves
KW  - Surfaces (Physics)
KW  - Materials Science
KW  - Characterization and Evaluation of Materials
KW  - Microwaves, RF and Optical Engineering
KW  - Measurement Science and Instrumentation
KW  - Surfaces and Interfaces, Thin Films
N1  - Introduction to surface texture measurement -- Some common terms and definitions -- Limitations of optical 3D sensors.- Calibration of optical surface topography measuring instruments.- Chromatic confocal microscopy -- Point autofocus instruments.- Focus variation instruments.- Phase shifting interferometry.-  Coherence scanning interferometry -- Digital holographic microscopy.- Imaging confocal microscopy.- Light scattering methods
ER  -