Introduction to surface and thin film processes
- Cambrige, UK ; New York : Cambridge University Press, 2000.
- xvi, 372 p. : ill. ; 26 cm.
Preface; 1. Introduction to surface processes; 2. Surfaces in vacuum: ultra-high vacuum techniques and processes; 3. Electron-based techniques for examining surface and thin film processes; 4. Surface processes in adsorption; 5. Surface processes in epitaxial growth; 6. Electronic structure and emission processes at metallic surfaces; 7. Semiconductor surfaces and interfaces; 8. Surface processes in thin film devices; 9. Postscript: where do we go from here?; Appendices; References.